For high repetition operation of excimer-lasers care has to be taken of the changing performance of the electrical circuit, gas dynamic effects and contamination of the gas mixture to avoid deterioration of the laser performance.
Publication type:Research Problem
Published:
Language:English
Licence:
CC BY 4.0
Peer Reviews (This Version): (0)
Red flags:
(0)
Actions
Download:
Sign in for more actionsSections
Research topics above this in the hierarchy
Funders
No sources of funding have been specified for this Research Problem.
Conflict of interest
This Research Problem does not have any specified conflicts of interest.